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Formation of silicon oxinitride from Si3N4 and SiO2 in the presence of Al2O3

✍ Scribed by Z.K. Huang; P. Greil; G. Petzow

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 607 KB
Volume: 10
Category: Article
ISSN: 0272-8842
DOI: 10.1016/0272-8842(84)90017-8

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