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The preparation and C-V characteristics of SiSi3N4 and SiSiO2Si3N4 structures

✍ Scribed by T.L. Chu; J.R. Szedon; C.H. Lee


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
797 KB
Volume
10
Category
Article
ISSN
0038-1101

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