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Wet low-temperature gate oxidation for nanoscale vertical field-effect transistors

✍ Scribed by M Goryll; J Moers; St Trellenkamp; L Vescan; M Marso; P Kordoš; H Lüth

Book ID: 104428734
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 171 KB
Volume: 19
Category: Article
ISSN: 1386-9477
DOI: 10.1016/s1386-9477(03)00287-x

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