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Volatile, Monomeric, and Fluorine-Free Precursors for the Metal Organic Chemical Vapor Deposition of Zinc Oxide

✍ Scribed by Daniela Bekermann; Detlef Rogalla; Hans-Werner Becker; Manuela Winter; Roland A. Fischer; Anjana Devi

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 435 KB
Volume: 2010
Category: Article
ISSN: 1434-1948
DOI: 10.1002/ejic.200901037

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