The synthesis and thermal evaluation of a novel cerium precursor to grow thick ceria films by metal-organic chemical vapor deposition (MOCVD)

ChemInform Abstract: The Synthesis and T

ChemInform Abstract: The Synthesis and Thermal Evaluation of a Novel Cerium Precursor to Grow Thick Ceria Films by Metal-Organic Chemical Vapor Deposition ( MOCVD).

✍ J. MCALEESE; J. A. DARR; B. C. H. STEELE 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 31 KB 👁 2 views

The Synthesis and Thermal Evaluation of a Novel Cerium Precursor to Grow Thick Ceria Films by Metal-Organic Chemical Vapor Deposition ( MOCVD). -The novel liquid precursor ((Ce(fod)3)2tetraglyme) (fod-H: 1,1,1,2,2,3,tetraglyme: MeO(CH2CH2O) 4Me) is prepared and characterized by NMR, TGA, and powder