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Visible Photoluminescence in Carbon-Implanted Thermal SiO2 Films

โœ Scribed by Yu, Y. H. ;Yu, Y. H. ;Wong, S. P. ;Wilson, I. H.

Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
113 KB
Volume
168
Category
Article
ISSN
0031-8965

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Silicon nanocrystals (nc-Si) embedded in SiO 2 glassy mixture have been prepared on glass substrates and silicon and germanium wafers by r.f. co-sputtering and post-annealing in a vacuum. Using Raman spectrometry, photoluminescence and electrical conductivity measurements, we have investigated the s