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Visible and infrared ellipsometry study of ion assisted SiO2 films

✍ Scribed by D. Souche; A. Brunet-Bruneau; S. Fisson; V. Nguyen Van; G. Vuye; F. Abeles; J. Rivory


Book ID
114086396
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
186 KB
Volume
313-314
Category
Article
ISSN
0040-6090

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