Vibrational spectroscopy of growth surfaces during photochemical deposition of aluminum from trimethylaluminum vapor

✍ Scribed by G.S. Higashi; L.J. Rothberg; C.G. Fleming

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 576 KB
• Volume: 115
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(85)80672-2

✦ Synopsis

Pulsed optoacousuc spectroscopy usmg a Raman-shrfted tunable dye laser IS used to record mfrared absorpuon spectra of surface adsorbates between 2800 and 3800 cm -' The techruque is sensmve to submonolayer coverages of OH and CH bond contammg specres on smgle crystal sapphrre. The chemical mreracuons between adsorbed water (the rmually donunant surface spccres), and tnmethylalumrnum (ThlA) are studred The effects of ultrawolet laser rrradratron rn vacuum and rn ambient ThfA vapor arc mvesttgated and used to draw conclusrons about the mechamsm of laser chenucal vapor depositron of organometalhcs