Mechanisms of low temperature epitaxial silicon growth using ArF excimer laser photochemical vapor deposition from disilane

✍ Scribed by B Fowler; S Lian; S Krishnan; L Jung; C Li; D Samara; I Manna; S Banerjee

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 969 KB
• Volume: 218
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(92)90902-n