Photochemical Vapor Deposition of Wide Bandgap III-V Materials: Influence of Photochemically Generated Radicals on the Growth of Aluminum Nitride and Gallium Nitride Films

✍ Scribed by Dr. James J. Alwan; Prof. J. Gary Eden

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 794 KB
• Volume: 3
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.19970030409