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Laser-induced chemical vapor deposition of aluminum from trimethylaluminum: wavelength and temperature dependence

✍ Scribed by Kanekazu Seki; Joan M. Frye; Hideo Okabe; Joshua B. Halpern

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
483 KB
Volume
132
Category
Article
ISSN
0022-0248

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## Abstract Summary: Laser irradiation at 193 nm of gaseous mixtures of carbon disulfide and ethene induces copolymerization of both compounds and affords chemical vapor deposition of conjugated nano‐chained C/S/H polymer, with contributions from C~2~H~4~ and CS~2~ almost unaffected by very differe