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Plasma induced chemical vapor deposition of Zr(C,B) from CpZr(BH4)3 (Cp C5H5⊖)

✍ Scribed by Dr. Silvia Reich; Dr. Johannes Messelhäuser; Prof. Harald Suhr; Prof. Gerhard Erker; Cornelia Fritze

Publisher: John Wiley and Sons
Year: 1994
Tongue: English
Weight: 336 KB
Volume: 6
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.19940060912

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