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Various applications of silicon nitride by catalytic chemical vapor deposition for coating, passivation and insulating films

✍ Scribed by Atsushi Masuda; Hironobu Umemoto; Hideki Matsumura

Book ID: 108288956
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 209 KB
Volume: 501
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.07.172

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