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Vacuum UV spectroscopic ellipsometry study on alloy films

✍ Scribed by T.H. Ghong; T.J. Kim; S.Y. Lee; Y.D. Kim; J.J. Kim; H. Makino; T. Yao

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
165 KB
Volume
39
Category
Article
ISSN
0026-2692

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