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Vacancies in as-grown CZ silicon crystals observed by low-temperature ultrasonic measurements

✍ Scribed by Hiroshi Yamada-Kaneta; Terutaka Goto; Yuichi Nemoto; Koji Sato; Masatoshi Hikin; Yasuhiro Saito; Shintaro Nakamura

Publisher: Springer US
Year: 2008
Tongue: English
Weight: 343 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-008-9715-0

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