Vacancies in defect-free zone of point-defect-controlled CZ silicon observed by low-temperature ultrasonic measurements

✍ Scribed by Hiroshi Yamada-Kaneta; Terutaka Goto; Yasuhiro Saito; Yuichi Nemoto; Koji Sato; Koichi Kakimoto; Shintaro Nakamura

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 365 KB
• Volume: 134
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2006.07.032