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Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

✍ Scribed by Matsuda, S.; Hara, M.; Miura, M.; Matsuda, T.; Ueda, U.M.; Satoh, Y.; Hashimoto, K.

Book ID: 119824068
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 388 KB
Volume: 59
Category: Article
ISSN: 0885-3010
DOI: 10.1109/tuffc.2012.2164

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