Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

✍ Scribed by Matsuda, S.M.; Hara, M.H.; Miura, M.M.; Matsuda, T.M.; Ueda, M.U.; Satoh, Y.S.; Hashimoto, K.H.

• Book ID: 119823963
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 285 KB
• Volume: 58
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/tuffc.2011.1996