✦ LIBER ✦

Ultrathin silicon dioxide films grown by photo-oxidation of silicon using 172 nm excimer lamps

✍ Scribed by Never Kaliwoh; Jun-Ying Zhang; Ian W. Boyd

No coin nor oath required. For personal study only.

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Direct photo-deposition of silicon dioxi

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Characterisation of ultraviolet annealed

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Silicon oxide thin films grown by Xe2∗ e

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