✦ LIBER ✦
Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172 nm excimer lamp
✍ Scribed by Jun-Ying Zhang; Vincent Dusastre; Ian W. Boyd
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 149 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1369-8001
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