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Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

✍ Scribed by P. Bergonzo; U. Kogelschatz; I.W. Boyd

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 426 KB
Volume: 69
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90540-r

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