Development of a novel large area excimer lamp for direct photo deposition of thin films

✍ Scribed by P. Bergonzo; P. Patel; I.W. Boyd; U. Kogelschatz

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 277 KB
• Volume: 54
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(92)90081-8