1002. A bakeable vacuum evaporator for the deposition of large area thin film circuits: W L Gleed et al, Vacuum, 18 (4), April 1968, 213–216

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 170 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)90784-7