A bakeable vacuum evaporator for the deposition of large area thin-film circuits : W. L. Gleed, J. S. Hill, K. H. Hursey and P. R. Stuart, Vacuum18, No. 4, p. 213

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 103 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90162-0