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Photo-Deposition of oxynitride and nitride films using excimer lamps

✍ Scribed by P. Bergonzo; I.W. Boyd

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 389 KB
Volume: 25
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90035-3

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## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable v