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Ultramicrotomy of diamond films for tem cross-section analysis

✍ Scribed by P. Swab

Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
281 KB
Volume
31
Category
Article
ISSN
1059-910X

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✦ Synopsis

Abstract

Ultramicrotomy has been used to prepare TEM cross‐sections of typical hard dielectric, semiconductor, and metal coatings, providing a critical capability in the study of structure‐property relationships of thin films. Ultramicrotomy of thin film coatings requires meticulous attention to technique and handling. The sample to be microtomed must be very small, well bonded to the epoxy embedding medium, and precisely oriented. In this article we report the ability to microtome TEM cross‐sections of diamond and cubic boron‐nitride (cBN) coatings. © 1995 Wiley‐Liss, Inc.

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✍ Weaver, Louise 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 232 KB 👁 2 views

The preparation of TEM cross-section samples from multilayer films or poorly adhering films is discussed in detail in a step-by-step approach designed to enable a competent experimentalist to reproduce the technique. The samples are mounted on an aperture grid and mechanically polished to 2-3 micron