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Cross-sectioning of layered thin films by ultramicrotomy

✍ Scribed by A.F. Marshall; D.C. Dobbertin

Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
487 KB
Volume
19
Category
Article
ISSN
0304-3991

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## Abstract Ultramicrotomy has been used to prepare TEM cross‐sections of typical hard dielectric, semiconductor, and metal coatings, providing a critical capability in the study of structure‐property relationships of thin films. Ultramicrotomy of thin film coatings requires meticulous attention to