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Ultra high aspect-ratio MEMS and NEMS on basis of fibrous composite technology

✍ Scribed by Sergey Sukhoveyev

Book ID: 106185413
Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 860 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0519-6

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