✦ LIBER ✦
De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem
✍ Scribed by Karthik S. Colinjivadi; Yonghao Cui; Matthew Ellis; George Skidmore; Jeong-Bong Lee
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 445 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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