[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Fabrication of ultra thick, ultra high aspect ratio microcomponents by deep and ultra deep X-ray lithography

[IEEE Comput. Soc International Conferen

✍ Mansour, R.R.; Bakri-Kassem, M.; Daneshmand, M.; Messiha, N. 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 978 KB

[IEEE Comput. Soc International Conferen

✍ Flores, G.; Mercado, G.A.; Pelesko, J.A. 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 558 KB

[IEEE Comput. Soc International Conferen

✍ Pelesko, J.A.; Goldsztein, G. 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 300 KB

[IEEE Comput. Soc International Conferen

✍ Chowdhury, S.; Ahmadi, M.; Miller, W.C. 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 325 KB

[IEEE Comput. Soc International Conferen

✍ Fedosejevs, R.; Argument, M.; Sardarli, A.; Kirkwood, S.E.; Holenstein, R.; Tsui 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 173 KB

[IEEE Comput. Soc International Conferen

✍ Zine-El-Abidine, I.; Okoniewski, M.; McRory, J.G. 📂 Article 📅 2003 🏛 IEEE Comput. Soc ⚖ 253 KB