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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Dynamics and touchdown in electrostatic MEMS

✍ Scribed by Flores, G.; Mercado, G.A.; Pelesko, J.A.

Book ID: 115508730
Publisher: IEEE Comput. Soc
Year: 2003
Weight: 558 KB
Volume: 0
Category: Article
ISBN-13: 9780769519470
DOI: 10.1109/icmens.2003.1221990

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