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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Laser micromachining for microfluidic, microelectronic and MEMS applications

✍ Scribed by Fedosejevs, R.; Argument, M.; Sardarli, A.; Kirkwood, S.E.; Holenstein, R.; Tsui, Y.Y.

Book ID: 121652246
Publisher: IEEE Comput. Soc
Year: 2003
Weight: 173 KB
Category: Article
ISBN-13: 9780769519470
DOI: 10.1109/ICMENS.2003.1221964

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