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Two-dimensional modelling of - radio-frequency discharges for a-Si:H deposition

✍ Scribed by Leroy, Olivier; Gousset, Gérard; Alves, Luís Lemos; Perrin, Jérôme; Jolly, Jacques

Book ID: 111887418
Publisher: Institute of Physics
Year: 1998
Tongue: English
Weight: 479 KB
Volume: 7
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/7/3/013

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