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Particle simulation of radio-frequency plasma discharges of methane for carbon film deposition

✍ Scribed by Nagayama, K.; Farouk, B.; Lee, Y.H.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma parameters of pulsed-dc discharge

✍ Corbella, C.; Rubio-Roy, M.; Bertran, E.; AnduÌjar, J. L. 📂 Article 📅 2009 🏛 American Institute of Physics 🌐 English ⚖ 618 KB

Decomposition of Methane and Carbon Diox

✍ Savinov, Sergey Y.; Lee, Hwaung; Song, Hyung Keun; Na, Byung-Ki 📂 Article 📅 1999 🏛 American Chemical Society 🌐 English ⚖ 194 KB

Particle-in-cell/Monte Carlo simulation

✍ Yan, M.; Goedheer, W.J. 📂 Article 📅 1999 🏛 IEEE 🌐 English ⚖ 279 KB

Polymer film deposition in inductively c

✍ I. I. Amirov; N. V. Alov 📂 Article 📅 2006 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 176 KB

Characterisation of nitrogen modified di

✍ Dorner-Reisel, A.; Kübler, L.; Irmer, G.; Reisel, G.; Schöps, S.; Klemm, V.; Mül 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 212 KB

Diamondlike carbon film deposition on a

✍ Y. Ohgoe; K. K. Hirakuri 📂 Article 📅 2005 🏛 American Institute of Physics 🌐 English ⚖ 270 KB