✦ LIBER ✦
Polymer film deposition in inductively coupled radio-frequency discharge plasma of perfluorocyclobutane mixed with sulfur hexafluoride
✍ Scribed by I. I. Amirov; N. V. Alov
- Book ID
- 110164518
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2006
- Tongue
- English
- Weight
- 176 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-1439
No coin nor oath required. For personal study only.