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Plasma parameters of pulsed-dc discharges in methane used to deposit diamondlike carbon films

✍ Scribed by Corbella, C.; Rubio-Roy, M.; Bertran, E.; Andújar, J. L.


Book ID
120424224
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
618 KB
Volume
106
Category
Article
ISSN
0021-8979

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