✦ LIBER ✦
Development of an energetic ion assisted mixing and deposition process for TiN[sub x] and diamondlike carbon films, using a co-axial geometry in plasma source ion implantation
✍ Scribed by Malik, Shamim M.
- Book ID
- 127361163
- Publisher
- AVS (American Vacuum Society)
- Year
- 1997
- Tongue
- English
- Weight
- 424 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580842
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