✦ LIBER ✦
Two-dimensional electrical modeling of asymmetric radio-frequency discharges for geometry effect analysis. Comparison with experiments
✍ Scribed by Radouane, K.; Despax, B.; Yousfi, M.; Couderc, J. P.; Klusmann, E.; Meyer, H.; Schulz, R.; Schulze, J.
- Book ID
- 111887345
- Publisher
- American Institute of Physics
- Year
- 2001
- Tongue
- English
- Weight
- 524 KB
- Volume
- 90
- Category
- Article
- ISSN
- 0021-8979
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