✦ LIBER ✦

Two-dimensional analysis of radio frequency discharges

✍ Scribed by Meyyappan, M.; Govindan, T.R.

Book ID: 117862737
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 494 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491741

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