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Tribological properties of DLC films prepared by magnetron sputtering

✍ Scribed by Wang Hong-mei; Zhang Wei; Yu He-long; Liu Qing-liang

Book ID
113846558
Publisher
Elsevier
Year
2011
Tongue
English
Weight
294 KB
Volume
18
Category
Article
ISSN
1875-3892

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The field emission properties of Ti-DLC films in diode and coplanar device structures were studied. An emission current density of 1.14 A/cm 2 could be obtained at an applied field of 33 V/mm and the threshold field was 24 V/mm for the coplanar emission structure. The silicon substrate was found to