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Trends in fabrication and applications of macroporous silicon

✍ Scribed by Lehmann, Volker


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
122 KB
Volume
197
Category
Article
ISSN
0031-8965

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We report the fabrication and characterization of capacitive immunosensors based on electrolyte-insulator-porous silicon (EIS) structures. The sensor structure, gold|silicon|porous silicon|SiO 2 |aminosilane|glutaraldehyde|antibody|phosphate-buffered-saline (PBS)|platinum, is fabricated with a low t

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## Abstract Square pore cross‐sections and pore arrays of high porosity can be produced by subsequent alkaline etching of macroporous silicon membranes. The dependence of pore geometry on etching time, solution temperature and composition is investigated. The produced membranes offer new roads to i