We report the fabrication and characterization of capacitive immunosensors based on electrolyte-insulator-porous silicon (EIS) structures. The sensor structure, gold|silicon|porous silicon|SiO 2 |aminosilane|glutaraldehyde|antibody|phosphate-buffered-saline (PBS)|platinum, is fabricated with a low t
Trends in fabrication and applications of macroporous silicon
β Scribed by Lehmann, Volker
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 122 KB
- Volume
- 197
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
A new molding process is developed in this work to generate a silicon (Si)-reinforced polydimethylsiloxane (PDMS) master of a 4 in wafer size using an SU-8 mold. The reinforced PDMS master is applied to pattern a conducting polymer, poly-3-hexylthiophene (P3HT), which is normally dissolved by a non-
## Abstract Square pore crossβsections and pore arrays of high porosity can be produced by subsequent alkaline etching of macroporous silicon membranes. The dependence of pore geometry on etching time, solution temperature and composition is investigated. The produced membranes offer new roads to i