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Fabrication and Sensing Applications of Microelectrodes on Silicon Substrates

✍ Scribed by Michael K. Andrews; Paul D. Harris


Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
183 KB
Volume
10
Category
Article
ISSN
1040-0397

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CVD of Alumina on Carbon and Silicon Car
✍ D. M. Giolando; J. R. Kirchhoff; H. Mueller; P. Q. Nguyen; I. N. Odeh πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 289 KB πŸ‘ 1 views

Using a vacuum CVD technique, alumina films were deposited on 10 lm diameter carbon fibers, and 120 lm diameter silicon carbide fibers. This was accomplished by exposing resistively heated microfiber substrates to a sublimate of [Al(O-t Bu) 3 ] 2 , while the reaction chamber was maintained at 120 C