Transport of sputtered atoms investigated by Monte Carlo method
โ Scribed by Settaouti, A.; Settaouti, L.
- Book ID
- 114445149
- Publisher
- The Institution of Engineering and Technology
- Year
- 2009
- Tongue
- English
- Weight
- 500 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1751-8822
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