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Monte Carlo simulation of the thermalization of sputtered atoms and reflected atoms in the magnetron sputtering discharge

✍ Scribed by Yamamura, Y.

Book ID: 121850774
Publisher: AVS (American Vacuum Society)
Year: 1995
Tongue: English
Weight: 617 KB
Volume: 13
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.579874

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