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On the anisotropy and thermalization of the metal sputtered atoms in a low-pressure magnetron discharge

✍ Scribed by Poucques, L. de; Vitelaru, C.; Minea, T. M.; Bretagne, J.; Popa, G.

Book ID: 121464016
Publisher: EDP Sciences
Year: 2008
Tongue: English
Weight: 293 KB
Volume: 82
Category: Article
ISSN: 0295-5075
DOI: 10.1209/0295-5075/82/15002

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