๐”– Bobbio Scriptorium
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Transport effects in low-pressure chemical vapor deposition reactors

โœ Scribed by J.S. Vrentas; C.M. Vrentas


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
964 KB
Volume
43
Category
Article
ISSN
0009-2509

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We demonstrate the synthesis of modulation-doped silicate glass. Secondary ion mass spectroscopy measurements show the B and P concentrations to strongly oscillate on a nanometre-scale. This finding is confirmed by scanning-electron microscopy. Finally we show that this novel type of material has ga