Modulation-doped silicate glass deposited by low-pressure chemical vapor deposition

✍ Scribed by M. Ilg; M. Kraxenberger; K. Uram; N. Sandler; C. Parks; S. Nguyen

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 305 KB
• Volume: 24
• Category: Article
• ISSN: 0749-6036
• DOI: 10.1006/spmi.1998.0594

✦ Synopsis

We demonstrate the synthesis of modulation-doped silicate glass. Secondary ion mass spectroscopy measurements show the B and P concentrations to strongly oscillate on a nanometre-scale. This finding is confirmed by scanning-electron microscopy. Finally we show that this novel type of material has gap-fill characteristics superior to those of conventional borophosphosilicate glass currently in use in the semiconductor industry.