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Beryllium-doped InGaAs grown by low-pressure metalorganic chemical vapor deposition

โœ Scribed by Takashi Kobayashi; Kenji Kurishima; Tadao Ishibashi


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
280 KB
Volume
142
Category
Article
ISSN
0022-0248

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Modulation-doped silicate glass deposite
โœ M. Ilg; M. Kraxenberger; K. Uram; N. Sandler; C. Parks; S. Nguyen ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 305 KB

We demonstrate the synthesis of modulation-doped silicate glass. Secondary ion mass spectroscopy measurements show the B and P concentrations to strongly oscillate on a nanometre-scale. This finding is confirmed by scanning-electron microscopy. Finally we show that this novel type of material has ga