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Transparent and Scratch-Resistant C:ZrOx Coatings on Polymer and Glass by Plasma-Enhanced Chemical Vapor Deposition

✍ Scribed by Sanjay Mathur; Thomas Ruegamer


Book ID
111328737
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
809 KB
Volume
8
Category
Article
ISSN
1546-542X

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The effects of hydrogen on GaN growth by remote plasma-enhanced metal-organic chemical vapor deposition (RPE-MOCVD) were investigated. Hydrogen addition changed the gas-phase reaction in the plasma and resulted in a Ga excess growth condition by scavenging activated nitrogen species, resulting in de