Effect of excess carbon on the hardness of SiC and TiC coatings formed by plasma-assisted chemical vapor deposition

✍ Scribed by K. Oguri; T. Arai

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 170 KB
• Volume: 186
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90152-4